6

The reaction of fluorine atoms with silicon

Year:
1981
Language:
english
File:
PDF, 727 KB
english, 1981
9

Catalyzed gaseous etching of silicon

Year:
1987
Language:
english
File:
PDF, 829 KB
english, 1987
19

The design of plasma etchants

Year:
1981
Language:
english
File:
PDF, 2.54 MB
english, 1981
20

Summary of meetings

Year:
1981
Language:
english
File:
PDF, 90 KB
english, 1981
39

Analysis of ozone at low concentrations with boric acid buffered potassium iodide

Year:
1977
Language:
english
File:
PDF, 731 KB
english, 1977